61-6984-57 ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 19.6N (2.0kgf) SFS-H60XCL
Features
- This piezo stage uses a digital sensor to achieve high precision, high rigidity, and high speed, while achieving a theoretical resolution of 1 nm.
- A piezo stage that can be positioned with high precision and resolution because it can be fully closed with the use of a digital sensor.
- Employing a piezo element as an actuator, it achieves a fine movement of 90 μm to 100 μm with open control and a theoretical resolution of 1 nm.
- A digital sensor (frequency → digital conversion system micro displacement sensor) is adopted as the position detection sensor to realize a display resolution of 10 nm in full closed loop control.
- By using the company's FINE series controller, the speed is increased.
- The repetition frequency is 10~15 Hz in SFS-H (direct motion). 25 Hz is achieved using the analog input of FINE-01γ.
- * The movement amount at the time of closing is about 20% of that at the time of opening.
Spec
- Movement amount: 100μm±15％
- Table surface size: 60 x 60mm
- ActuatorPiezo actuator
- Mass: 0.4kg
- Theory resolution (when open): 1nm
- Resolution (when close): 10nm
- Linearity: ＜0.3％
- Verticality (horizontal direction): 1μm
- Repeatable positioning accuracy: ＜0.1μm
- Withstand load: 19.6N (2.0kgf)
- displacement sensor: Digital sensor
- Compatible cable: FINE-CA-3: DS1-CA-3 for Piezo: for digital sensor
- CE conform product
| Order No. | 61-6984-57 | |
|---|---|---|
| Model No. | SFS-H60XCL | |
| 標準価格 |
JPY: 250,000
USD: 1,568.19
Excange rate 1USD= 159.42JPY
Valid price in Japan |
|
| Quantity | 1piece | |
![<!--@[ia-1]@-->取扱停止<!--@/[ia-1]@-->](/en/asone/img/usestop_en_US.png?v=03790be0f2ba82c1280907a7033cf49dabaaa7c1){kind=small}
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| 在庫数 | - | |
商品のバリエーション （サイズ違い・スペック違い・オプション品など）
| 商品イメージ | アズワン品番 | 商品名 | 型番 | QuantityDiscontinuedlass="init">
61-6984-57 ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 19.6N (2.0kgf) SFS-H60XCL特徴
仕様
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