61-6984-55 ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 90μm ±15% Withstand Load: 9.8N (1.0kgf) SFS-H40XCL
Features
- This piezo stage uses a digital sensor to achieve high precision, high rigidity, and high speed, while achieving a theoretical resolution of 1 nm.
- A piezo stage that can be positioned with high precision and resolution because it can be fully closed with the use of a digital sensor.
- Employing a piezo element as an actuator, it achieves a fine movement of 90 μm to 100 μm with open control and a theoretical resolution of 1 nm.
- A digital sensor (frequency → digital conversion system micro displacement sensor) is adopted as the position detection sensor to realize a display resolution of 10 nm in full closed loop control.
- By using the company's FINE series controller, the speed is increased.
- The repetition frequency is 10~15 Hz in SFS-H (direct motion). 25 Hz is achieved using the analog input of FINE-01γ.
- * The movement amount at the time of closing is about 20% of that at the time of opening.
Spec
- Movement amount: 90μm +/- 15%
- Table surface size: 40 x 40mm
- ActuatorPiezo actuator
- Mass: 0.28kg
- Theory resolution (when open): 1nm
- Resolution (when close): 10nm
- Linearity: ＜0.3％
- Verticality (horizontal direction): 1μm
- Repeatable positioning accuracy: ＜0.1μm
- Withstand load: 9.8N (1.0kgf)
- displacement sensor: Digital sensor
- Compatible cable: Cable (2m) included
- CE conform product
| Order No. | 61-6984-55 | |
|---|---|---|
| Model No. | SFS-H40XCL | |
| Standard price |
JPY: 250,000
USD: 1,567.10
Excange rate 1USD= 159.53JPY
Valid price in Japan |
|
| Quantity | 1piece | |
|
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| Stock in Japan | - | |
Product Variations (Different Sizes, Specifications, Optional Products, etc.)
| Product image | Order No. | Name | Model No. | Quantity | Standard price | Valid price in Japan | Stock [Supplier Stock] |
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|---|---|---|---|---|---|---|---|---|
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61-6984-55 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 90μm ±15% Withstand Load: 9.8N (1.0kgf) SFS-H40XCL | SFS-H40XCL | 1piece | JPY: 250,000 | USD: 1,567.10 |
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61-6984-56 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 6.7N (0.7kgf) SFS-H40ZCL | SFS-H40ZCL | 1piece | JPY: 250,000 | USD: 1,567.10 |
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61-6984-57 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 19.6N (2.0kgf) SFS-H60XCL | SFS-H60XCL | 1piece | JPY: 250,000 | USD: 1,567.10 |
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61-6984-58 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 14.7N (1.5kgf) SFS-H60XYCL | SFS-H60XYCL | 1piece | JPY: 490,000 | USD: 3,071.52 |
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61-6984-59 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 9.8N (1.0kgf) SFS-H60ZCL | SFS-H60ZCL | 1piece | JPY: 270,000 | USD: 1,692.47 |
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61-6984-60 | ［Discontinued］Sigma Fine Stage (High-Rigidity Type) Movement Amount 100μm ±15% Withstand Load: 9.8N (1.0kgf) SFS-H60XYZCL | SFS-H60XYZCL | 1piece | JPY: 560,000 | USD: 3,510.31 |
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