4-1528-03 Wafer Hot Chuck Φ6 Black alumite PH201S-06
Features
- Uniformly heats ultra-thin workpieces such as wafers and glass substrates.
- The workpiece can be fixed by vacuum suction.
- Precise temperature control is possible with the attached temperature controller.
Spec
- Plate size: Φ6 inch
- Surface Treatment: Black alumite
- Chuckable Size: Φ2 to 6 in
- Temperature Control Range: R.T. to 200 ° C
- Temperature Accuracy: ± 1.5%
- Electric capacity: 900 W
- Size: 200 x 234 x 54 mm
- Weight: about 3 kg
- power supply: AC100V 50/60 Hz
- Size: 98 x 156 x 101 mm
- Weight: about 1.3 kg
- *Requires separate vacuum pumps (Recommended pumps Example: 1 -9197 - 02 Diaphragm Dry vacuum pumps DAP -12 S).
Package size：222×257×40 mm 3 kg [About Package size]
| Order No. | 4-1528-03 | |
|---|---|---|
| Model No. | PH201S-06 | |
| Standard price |
JPY: 453,000
USD: 2,839.59
Excange rate 1USD= 159.53JPY
Valid price in Japan |
|
| Quantity | 1piece | |
| Stock in Japan |
|
|
| Supplier Stock |
|
|
Product Variations (Different Sizes, Specifications, Optional Products, etc.)
| Product image | Order No. | Name | Model No. | Quantity | Standard price | Valid price in Japan | Stock [Supplier Stock] |
|
|---|---|---|---|---|---|---|---|---|
 |
4-1528-01 | Wafer Hot Chuck Φ4 Black alumite PH201S-04 | PH201S-04 | 1piece | JPY: 395,000 | USD: 2,476.02 |
|
|
 |
4-1528-03 | Wafer Hot Chuck Φ6 Black alumite PH201S-06 | PH201S-06 | 1piece | JPY: 453,000 | USD: 2,839.59 |
|
Related Products
Product Catalog
| Catalog Name | Page |
|---|---|
| AS ONE Catalog 2021 [Instruments for Laboratory] | 90 |