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4-1528-01 Wafer Hot Chuck Φ4 Black alumite PH201S-04

Features

  • Uniformly heats ultra-thin workpieces such as wafers and glass substrates.
  • The workpiece can be fixed by vacuum suction.
  • Precise temperature control is possible with the attached temperature controller.

Spec

  • Plate size: Φ4 inch
  • Surface Treatment: Black alumite
  • Chuckable Size: Φ2 to 4 in
  • Temperature Control Range: R.T. to 200 ° C
  • Temperature Accuracy: ± 1.5%
  • Electric capacity: 400 W
  • Size: 140 x 170 x 50.5 mm
  • Weight: about 3 kg
  • power supply: AC100V 50/60 Hz
  • Size: 98 x 156 x 101 mm
  • Weight: about 1.3 kg
  • *Requires separate vacuum pumps (Recommended pumps Example: 1 -9197 - 02 Diaphragm Dry vacuum pumps DAP -12 S).
  •  

Package size:222×257×40 mm 3 kg  [About Package size]

Order No. 4-1528-01
Model No. PH201S-04
Standard price JPY: 395,000 USD: 2,476.02
Excange rate 1USD= 159.53JPY
Valid price in Japan
Quantity 1piece
Stock in Japan
Supplier Stock

Product Variations (Different Sizes, Specifications, Optional Products, etc.)

Product image Order No. Name Model No. Quantity Standard price Valid price in Japan Stock
[Supplier Stock]
4-1528-01 Wafer Hot Chuck Φ4 Black alumite PH201S-04 PH201S-04 1piece JPY: 395,000 USD: 2,476.02

4-1528-03 Wafer Hot Chuck Φ6 Black alumite PH201S-06 PH201S-06 1piece JPY: 453,000 USD: 2,839.59

Related Products

Product Catalog

Catalog Name Page
AS ONE Catalog 2021 [Instruments for Laboratory] 90