3-6947-03 Mass Flow Controller 20SLM Ar C1020-4S2-20L-Ar
Features
- Achieves high flow rate precision without temperature correction circuit by adopting thermal flow sensor.
- Restricts flow surge phenomena at the time of start(interval of 30seconds or more is required).
Spec
- Model number: C1020-4S2-20L-Ar
- Flow rate (SLM): 20
- Gas: Ar
- Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
- Reproducibility: +/- 0.2% FS
- Flow rate control range: 5 - 100% FS
- Fluid: Gas
- Available temperature: 5 - 50℃ 85%RH or less
- Responsiveness: 6sec
- Operation pressure range: 50 - 300kPa
- Pressure resistance: 1MPa (G)
- External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
- Gas contact unit material: Stainless Steel (SUS316), PTFE, fluorine Rubber
- Surface treatment: Mechanical processing finish
- Fittings: Equivalent to 1/4in.SWL
- Input and output: Analog signal (0 - 5VDC)
- Valve type: N/O normal open
- Drive power: +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
- Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
- Size: 160 x 33.6 x 105mm
Package size:160×34×105 mm 1 kg [About Package size]
| Order No. | 3-6947-03 | |
|---|---|---|
| Model No. | C1020-4S2-20L-Ar | |
| JAN Code | 4589645251016 | |
| Standard price |
JPY: 121,000
USD: 758.48
Excange rate 1USD= 159.53JPY
Valid price in Japan |
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| Quantity | 1piece | |
| Stock in Japan |
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| Supplier Stock |
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Product Variations (Different Sizes, Specifications, Optional Products, etc.)
| Product image | Order No. | Name | Model No. | Quantity | Standard price | Valid price in Japan | Stock [Supplier Stock] |
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|---|---|---|---|---|---|---|---|---|
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3-6946-01 | Mass Flow Controller 10SLM Air C1020-4S2-10L-Air | C1020-4S2-10L-Air | 1piece | JPY: 121,000 | USD: 758.48 |
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3-6946-02 | Mass Flow Controller 10SLM N2 C1020-4S2-10L-N2 | C1020-4S2-10L-N2 | 1piece | JPY: 121,000 | USD: 758.48 |
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3-6946-03 | Mass Flow Controller 10SLM Ar C1020-4S2-10L-Ar | C1020-4S2-10L-Ar | 1piece | JPY: 121,000 | USD: 758.48 |
|
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3-6946-04 | Mass Flow Controller 10SLM He C1020-4S2-10L-He | C1020-4S2-10L-He | 1piece | JPY: 120,000 | USD: 752.21 |
|
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3-6946-05 | Mass Flow Controller 10SLM H2 C1020-4S2-10L-H2 | C1020-4S2-10L-H2 | 1piece | JPY: 121,000 | USD: 758.48 |
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3-6947-01 | Mass Flow Controller 20SLM Air C1020-4S2-20L-Air | C1020-4S2-20L-Air | 1piece | JPY: 121,000 | USD: 758.48 |
|
|
![]() |
3-6947-02 | Mass Flow Controller 20SLM N2 C1020-4S2-20L-N2 | C1020-4S2-20L-N2 | 1piece | JPY: 121,000 | USD: 758.48 |
|
|
![]() |
3-6947-03 | Mass Flow Controller 20SLM Ar C1020-4S2-20L-Ar | C1020-4S2-20L-Ar | 1piece | JPY: 121,000 | USD: 758.48 |
|
|
![]() |
3-6947-04 | Mass Flow Controller 20SLM He C1020-4S2-20L-He | C1020-4S2-20L-He | 1piece | JPY: 120,000 | USD: 752.21 |
|
|
![]() |
3-6947-05 | Mass Flow Controller 20SLM H2 C1020-4S2-20L-H2 | C1020-4S2-20L-H2 | 1piece | JPY: 121,000 | USD: 758.48 |
|
|
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3-8034-01 | Mass Flow Controller 30LM Air C1030-4S2-30L-Air | C1030-4S2-30L-Air | 1piece | JPY: 133,000 | USD: 833.70 |
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3-8034-02 | Mass Flow Controller 30LM N2 C1030-4S2-30L-N2 | C1030-4S2-30L-N2 | 1piece | JPY: 133,000 | USD: 833.70 |
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![]() |
3-8034-03 | Mass Flow Controller 30LM Ar C1030-4S2-30L-Ar | C1030-4S2-30L-Ar | 1piece | JPY: 133,000 | USD: 833.70 |
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![]() |
3-8034-04 | Mass Flow Controller 30LM He C1030-4S2-30L-He | C1030-4S2-30L-He | 1piece | JPY: 132,000 | USD: 827.43 |
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![]() |
3-8034-05 | Mass Flow Controller 30LM H2 C1030-4S2-30L-H2 | C1030-4S2-30L-H2 | 1piece | JPY: 133,000 | USD: 833.70 |
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|
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3-8035-01 | Mass Flow Controller 50LM Air C1050-4S2-50L-Air | C1050-4S2-50L-Air | 1piece | JPY: 138,000 | USD: 865.04 |
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|
![]() |
3-8035-02 | Mass Flow Controller 50LM N2 C1050-4S2-50L-N2 | C1050-4S2-50L-N2 | 1piece | JPY: 138,000 | USD: 865.04 |
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|
![]() |
3-8035-03 | Mass Flow Controller 50LM Ar C1050-4S2-50L-Ar | C1050-4S2-50L-Ar | 1piece | JPY: 138,000 | USD: 865.04 |
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|
![]() |
3-8035-04 | Mass Flow Controller 50LM He C1050-4S2-50L-He | C1050-4S2-50L-He | 1piece | JPY: 137,000 | USD: 858.77 |
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![]() |
3-8035-05 | Mass Flow Controller 50LM H2 C1050-4S2-50L-H2 | C1050-4S2-50L-H2 | 1piece | JPY: 138,000 | USD: 865.04 |
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Product Catalog
| Catalog Name | Page |
|---|---|
| AS ONE Catalog 2025 [Instruments for Laboratory] | 688 |
| AS ONE Catalog 2023 [Instruments for Laboratory] | 826 |
| AS ONE Catalog 2021 [Instruments for Laboratory] | 770 |
| AS ONE Catalog 2019 [Instruments for Laboratory] | 748 |
| AS ONE Catalog 2017 [Instruments for Laboratory] | 584 |





















