Spec

• Model number: C1020-4S2-10L-N2
• Flow rate (SLM): 10
• Gas: N2
• Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
• Reproducibility: +/- 0.2% FS
• Flow rate control range: 5 - 100% FS
• Fluid: Gas
• Available temperature: 5 - 50℃ 85%RH or less
• Responsiveness: 6sec
• Operation pressure range: 50 - 300kPa
• Pressure resistance: 1MPa (G)
• External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
• Gas contact unit material: Stainless Steel (SUS316), PTFE, fluorine Rubber
• Surface treatment: Mechanical processing finish
• Fittings: Equivalent to 1/4in.SWL
• Input and output: Analog signal (0 - 5VDC)
• Valve type: N/O normal open
• Drive power: +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
• Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
• Size: 160 x 33.6 x 105mm
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