Features

• It is an XY automatic stage capable of high speed, sudden stop and short time setting, strongly conscious of FA application.
• In the case of repeated high-speed movement and sudden stop, setting is performed in approximately 60 ms, so that the entire inspection range of approximately 10,000 work patterns within a 150 mm×150 mm area can be scanned in approximately 17 minutes, for example.
• With a repeatability of ±0.002 mm, the position within the high-magnification microscope field of view (approximately Φ0.1 mm) is also sufficiently reproducible.
• Combined with the ultra-high-speed tracking autofocus microscope system manufactured by Chuo Seiki Co., Ltd., it provides the highest performance for visual inspection, etc.
• Accuracy is not compromised by the use of ball screws and cross roller guides.
• Equipped with an origin sensor (photo sensor) as standard, high-precision return to origin is possible. A limit sensor is also provided as standard.
• It is a product for FA application equipped with stepping motor αSTEP that enables high-speed, sudden stop and short-time setting by closed-loop control. (αSTEP is a registered trademark of Oriental Motor Co., Ltd. in Japan and other countries.)