SMC Corporation

65-5515-66 Gas Fillter SFA20002

Features

  • Corresponds to SFA100, 200, 300 and SFB100 cartridge types that can replace elements.
  • Compact disposable type for semiconductor processes, compatible with SFB300 and SFC100.

Spec

  • Filtration Precision (μm): 0.01
  • Applicable Model: SFA20002
  • Working pressure (MPa): 0.99
  • Process air flow rate (m3/min): 0.06
  • Connection aperture: Rc1/4
  • Total length (mm): 51
  • Cartridge Type
  • Material/Finish: SUS316
  • Mass: 440 g
  • Country of Origin: Japan
  • Securities Code: 118-4045
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Order No. 65-5515-66
Model No. SFA20002
Standard price JPY: 31,540 USD: 197.84
Excange rate 1USD= 159.42JPY
Valid price in Japan
Quantity 1piece
Stock in Japan
Supplier Stock

Product Variations (Different Sizes, Specifications, Optional Products, etc.)

Product image Order No. Name Model No. Quantity Standard price Valid price in Japan Stock
[Supplier Stock]
65-5515-65 gas filter SFA10002 SFA10002 1piece JPY: 28,390 USD: 178.08

65-5515-66 Gas Fillter SFA20002 SFA20002 1piece JPY: 31,540 USD: 197.84

65-5515-67 gas filter SFA30002 SFA30002 1piece JPY: 37,070 USD: 232.53