Spec

• Rotary Table Part/Rotational Precision (radial direction): (0.02 + 3.5 H/1000) μm H Measured Height (mm)
• Rotary Table Part/Rotational Accuracy (axial direction): (0.02 + 3.5 X/10,000) μm X Distance from Center of Rotation (mm)
• Rotary Table Part/Rotational Speed: 2, 4, 6, 10 rpm (automatic centripetal 20 rpm)
• Rotary Table Part/Table Effective Diameter: φ 300 mm
• Rotary Table Part/Center, Horizontal Adjustment Mechanism: A.A.T
• Rotary Table Part/Centering Adjustment Range: ± 5 mm
• Rotary Table Part/Horizontal Adjustment Range: ± 1 °
• Rotary Table Part/Maximum Loading Mass: 80 kg (65 kg at automatic centripetal)
• Rotary Table Part/Maximum Measurement Diameter: φ 356 mm
• Rotary Table Part/Maximum Loading Diameter: φ 680 mm
• upper and lower Sports Club (Z axis column section)/Straightness (narrow range) (λc 2.5 mm) : 0.05 μm/100 mm
• upper and lower Sports Club (Z axis column section)/Movement Straightness (wide range) (λc 2.5 mm) : 0.14 μm/350 mm to 0.2 μm/550 mm
• Vertical Controller (Z axis column section)/Parallelism to Rotation Axis (busbar reference): 0.2 μm/350 mm to 0.32 μm/550 mm
• Vertical moving part (Z axis column section)/Movement speed: Maximum 60 mm/s (Measured 0.5/1.0/2.0/5.0 mm/s)
• Vertical Moving Portion (Z axis column section)/upper and lower Transfer Amount: 350 to 550 mm
• Vertical moving part (Z axis column section)/Maximum measurement height (inner diameter/Outer Diameter Constant): 350 to 550 mm
• Vertical Moving Part (Z axis column section)/Maximum Measurement Depth (When using the standard probe): φ 32 mm or More/Depth 104 mm, φ 12.7 mm or More/Depth 26 mm
• Radial Displacement/Straightness: 0.4 μm/200 mm (λc 2.5 mm)
• Radial Travel/Axis of Rotation Speed: 0.5 μm/200 mm (busbar reference)
• Radial Displacement/Displacement: 225 mm (-25 mm move from pivot point)
• Radial Displacement/Movement Speed: Maximum 50 mm/s (Measured 0.5/1.0/2.0/5.0 mm/s)
• Detector/measuring force: 40 mN
• Detector/Meter tip shape, material: φ 1.6 mm Super Hard Sphere
• Detector/detection range (Standard): ± 400 μm/± 40 μm/± 4 μm
• Detector/Range of Detection (following): ± 5 mm
• Detector/Other: Accidental touch function, measurement direction/1 direction
• power supply: 100 V to: 240 V
• Air Pressure: 0.39 MPa
• Air Consumption: 45 L/min at Reference Condition [More than 80 L/min air sources]
• Weight of vibration isolation table: 170 kg
• Weight: 650 to 670 kg
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