Spec

• X 1 Axis measurement range: 200 mm
• X 1 Axis resolution: 0.00625 μm
• X1 Axis Length Measuring Unit: Laser Holographic Scale
• X1 Axis Driving Speed/CNC Mode: up to 40 mm/s
• X1 Axis Driving Speed/Joystick Mode: 0 to 40 mm/s
• X1 Axis Measurement Speed: Roughness Measurement 0.02, 0.05, 0.1, 0.2 mm/s, Contour Measurement 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0 mm/s
• X 1 axis measurement direction: both pull and push directions
• X1 Axis Straight Precision/Standard Length When Using Starrice: (0.1 + 0.0015 L) μm L Driving Length (mm) or (0.05 + 0.0003 L) μm L Driving Length (mm)
• X1 Axis Straight Precision/2x Length When Using Starrice: (0.2 + 0.0015 L) μm L Driving Length (mm) or (0.1 + 0.0015 L) μm L Driving Length (mm)
• X1 Axis Pointing Accuracy (20 ° C): ± (0.3 + 0.002 L) μm L Driving Length (mm) or ± (0.16 + 0.001 L) μm L Driving Length (mm)
• Z1 Axis measurement range/Standard Length When using Starrice: 12 mm
• Z1 Axis measurement range/2x Length When using Starrice: 24 mm
• Z1 Axis resolution/Standard Length When using Starrice: 0.0008 μm
• Z1 Axis resolution/2x Length When using Starrice: 0.0016 μm
• Z1 Starrice upper and lower Motion: Arc Motion
• Z1 Axis Length Measuring Unit: Transparent Linear Encoder
• Z1 Axis Pointing Accuracy (20 ° C): ± (0.3 + I 0.02 H I) μm H Measurement Height (mm) or ± (0.07 + I 0.02 H I) μm H Measurement Height (mm)
• Z1 Axis Measurement Force/Standard Length When using Starrice: 4 mN1 Constant
• Z1 Axial Measuring Force/2 Times Length Stabilizing When Used: 0.75 mN1 Constant
• Z1 axis follow-up angle: Up 60 °, Down 60 ° (Depend on the surface properties)
• Z1-Axis Starrice tip shape/Regular Length Stylus: Tip Radius 5 μm, Tip Angle 40 °, Diamond
• Z1 Axis Stirrup tip shape/Standard Length Pole Stylus: Tip Ball Radius 0.25 mm, Sapphire
• Z1-Axis Starrice tip shape/2-Length Stylus: Tip Radius 5 μm, Tip Angle 40 °, Diamond
• Z1 Starrice tip shape/2x Length Stylus: None or Tip Radius 2 μm, Tip Angle 60 °, Diamond
• Z1 Axis Stirrup tip shape/2 x Length Pole Stylus: Tip Ball Radius 0.25 mm, Sapphire
• Z1 Measurement Plane Direction: Down
• Z2 Axis Movement Range/Z2 Axis Type S: 300 mm
• Z2 Axis Movement Range/Z2 Axis Type H: 500 mm or None
• Z2 Axis resolution: 0.05 μm
• Z2 Axis Length Measuring Unit: Reflective Linear Encoder
• Z2 Axis Drive Speed/CNC Mode: up to 200 mm/s
• Z2 Axis Driving Speed/Joystick Mode: 0 to 50 mm/s
• Base Part/Base Size (Width x Depth): 750 x 600 mm
• Base/Base material: Gouge
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