Spec

• measurement range (X x Y x Z) : 300 to 600 x 200 to 650 x 200 to 250 mm
• Observation device: program-controlled power turret 1 x -2 x -6 x
• Minimum Displayed Amount: 0.1 μm
• Length measuring unit: linear encoder
• Image pickup device: Select either B CCD (1/2 Type) or 3 CCD colors (1/3 Type)
• lighting devices (Vertical epi-illumination, transmitted illumination, and program controlled ring illumination): white LEDs
• Measurement Precision E1/X/Y Axis: (1.5 + 3L/1000) μm
• Measurement accuracy E1/Z axis: (1.5 + 4L/1000) μm
• Measurement accuracy in E2/XY plane: (2.0 + 4L/1000) μm
• Tracking auto focus device: with/without
• Size of glass: 399 to 697 x 271 to 758 mm
• maximum loading capacity of measurement: 20 to 50 kg
• Tracking autofocus/laser light source: semiconductor laser peak wavelength 690 mm
• Tracking auto focus/laser safety: Class (JIS C 68022011, EN/IEC 60825 -12007) compliant
• Tracking auto focus system: Coaxial objective lens system (knife-edge method)
• Tracking Autofocus/Adaptive Objective: QV-HR1x, QV-SL1x, QV-HR 2.5 x, QV-SL 2.5 x, QV -5 x
• Tracking range: QV-HR1x, QV-SL1x/6.3 mm (± 3.15 mm), QV-HR 2.5 x, QV-SL 2.5 x/1 mm (± 0.5 mm), QV -5 x/0.25 mm (± 0.125 mm)
• Size: External view of main unit Dimensions (W x D x H)/859 to 1309 x 951 to 1985 x 1609 to 1794 mm
• Weight: Approx. 360 to 1450 kg
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