特徴

• The KD series is a compact direct diaphragm valve with a high Cv value, high quality compatible with high purity gases for semiconductors, and high durability and corrosion resistance.
• Excellent gas displacement characteristics are achieved by minimizing the body profile size and reducing the volume to 1.2cm3 (1/4"CVC male Open).
• We have pursued high sealing performance, high durability, degassing performance, and corrosion resistance to the utmost with our unique gas contact seal structure.
• High corrosion resistance with carefully selected diaphragm materials and unique molding methods eliminate individual differences to achieve high durability.
• With the highest level of manufacturing environment and internal polishing processing, we have pursued particle performance to the extreme in response to high purity gas for semiconductors.