61-6985-66 Vacuum Specification Automatic Rotation Stage VSGSP-120YAW
Features
- Automatic rotation stage for vacuum environment.
- The compact type that can save space of φ60 mm is ideal for use in experiments and in the chamber of inspection equipment.
- φ120 mm is equipped with a limit sensor for vacuum environments.
- Although it is thin, it uses a large motor of □ 42 mm, thereby achieving a high load capacity.
- A 1m Teflon coated cable is provided for direct connection from the vacuum motor and vacuum limit switch to the chamber connector.
Spec
- [
Common specification] - Motor type: VSGSP-60YAW: Vacuum specification 5 phase stepping motor 0.66A/phase (Tamagawa Seiki (Co., Ltd.)), VSGSP-120YAW: Vacuum Specification 5 phase stepping motor 0.75A/phase (Oriental Motor (Co., Ltd))
- Motor product number: VSGSP-60YAW: TS3664N5 (□24mm) , VSGSP-120YAW: PK543V-NB (□42mm)
- Motor step angle: 0.72°
- Sensor power voltage: VSGSP-60YAW: -, VSGSP-120YAW: DC5 - 24V
- Sensor power consumption: VSGSP-60YAW: -, VSGSP-120YAW: Consumption current 10mA (Max 20mA)
- Sensor control output: VSGSP-60YAW: Contact method, VSGSP-120YAW: Mechanical
- Sensor output logic: NORMAL OPEN
- Compatible driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL
- Compatible controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
- [Individual specification]
- Rotation range: In counter Clockwise CCW direction, at ∞, In clockwise CW direction near at 0 degree (? 2.5°), it stops
- Table surface size: φ120mm
- Moving mechanism: Worm worm wheel
- Movement guide: Crossed roller
- Stage material: Aluminum, Stainless Steel
- Surface treatment: No
- Mass: 1.7kg
- Resolution/(full): 0.005°/Pulse
- Resolution (half): 0.0025°/Pulse
- Max speed: 20°/sec
- Repeat positioning accuracy: 0.02°
- Withstand load: 98.0N (10.0kgf)
- Lost motion: 0.05°
- Sensor type: GN-STM35A-1 (Metrol Co., Ltd.)
- Limit sensors: Vacuum touch sensor (NORMAL OPEN)
- Origin sensor: No
- Proximity origin sensor: No
| Order No. | 61-6985-66 | |
|---|---|---|
| Model No. | VSGSP-120YAW | |
| Standard price |
JPY: 624,000
USD: 3,911.49
Excange rate 1USD= 159.53JPY
Valid price in Japan |
|
| Quantity | 1piece | |
| Stock in Japan |
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| Supplier Stock |
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Product Variations (Different Sizes, Specifications, Optional Products, etc.)
| Product image | Order No. | Name | Model No. | Quantity | Standard price | Valid price in Japan | Stock [Supplier Stock] |
|
|---|---|---|---|---|---|---|---|---|
 |
61-6985-62 | Vacuum Specification Automatic Rotation Stage VSGSP-60YAW | VSGSP-60YAW | 1piece | JPY: 576,000 | USD: 3,610.61 |
|
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61-6985-66 | Vacuum Specification Automatic Rotation Stage VSGSP-120YAW | VSGSP-120YAW | 1piece | JPY: 624,000 | USD: 3,911.49 |
|
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