61-6985-60 ［Discontinued］Vacuum Specification Small Automated Stage 19.6N (2.0kgf) VSGSP-60XY
特徴
- This is a small automatic stage used in the chamber of a measuring device for experiments.
- Compact slim body, effective for space saving.
- A 1m Teflon coated cable is provided for direct connection from the vacuum motor and vacuum limit switch to the chamber connector.
Spec
- [
Common specification] - Motor type: Vacuum specification 5 phase stepping motor 0.75A/phase (Tamagawa Seiki (Co., Ltd.))
- Motor product number: TS3664N5 (□42mm)
- Motor step angle: 0.72°
- Sensor control output: Contact method
- Sensor output logic: NORMAL OPEN
- Compatible driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL
- Compatible controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
- [Individual specification]
- Movement amount: 20mm
- Table surface size: 55 x 60mm
- Feed crew: Precision grinding screw φ4mm, Lead 0.5mm
- Movement guide: Crossed roller
- Stage material: Aluminum
- Surface treatment: No
- Mass: 1.1kg
- Resolution/(full): 1μm/pulse
- Resolution (half): 0.5μm/Pulse
- Max speed: 5mm/sec
- Repeat positioning accuracy: 6μm
- Withstand load: 19.6N (2.0kgf)
- Lost motion: 5μm
- Sensor type: Vacuum limit switch
- Limit sensors: Contact method
- Origin sensor: No
- Proximity origin sensor: No
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61-6985-60 ［Discontinued］Vacuum Specification Small Automated Stage 19.6N (2.0kgf) VSGSP-60XY特徴
仕様
商品のバリエーション （サイズ違い・スペック違い・オプション品など）
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61-6985-60 ［Discontinued］Vacuum Specification Small Automated Stage 19.6N (2.0kgf) VSGSP-60XYFeatures
Spec
Product Variations (Different Sizes, Specifications, Optional Products, etc.)
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