3-5064-05 Mass Flow Controller 10SCCM-H2 C1005
Features
- Thermal flow sensors are less sensitive to external temperature.
- Suppresses the flow surge phenomenon at the start.
Spec
- Model number: C1005
- Full scale flow rate - gas type: 10SCCM-H2
- Gas type: H2
- Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
- Responsiveness: 6sec
- Flow rate control range: 5 - 100% FS
- Input and output: Analog signal (0 - 5VDC)
- Valve type: N/O normal open
- Reproducibility: +/- 0.2% FS
- Operation pressure range: 50 - 300kPa
- Pressure resistance: 1MPa (G)
- External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
- Gas contact unit material: Stainless Steel (SUS316), PTFE, Fluorine rubber
- Connection: Equivalent to 1/4in.SWL
- Power supply: + 15VDC +/- 5% 60mA, - 15VDC +/- 5% 150mA
- Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
- Size: 127 x 25.5 x 100mm
Package size：130×26×100 mm 600 g [About Package size]
| Order No. | 3-5064-05 | |
|---|---|---|
| Model No. | C1005 | |
| JAN Code | 4589645250057 | |
| Standard price |
JPY: 104,000
USD: 651.92
Excange rate 1USD= 159.53JPY
Valid price in Japan |
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| Quantity | 1piece | |
| Stock in Japan |
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| Supplier Stock |
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Product Variations (Different Sizes, Specifications, Optional Products, etc.)
| Product image | Order No. | Name | Model No. | Quantity | Standard price | Valid price in Japan | Stock [Supplier Stock] |
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|---|---|---|---|---|---|---|---|---|
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3-5064-01 | Mass Flow Controller 10SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-02 | Mass Flow Controller 10SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-03 | Mass Flow Controller 10SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-04 | Mass Flow Controller 10SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-05 | Mass Flow Controller 10SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-13 | Mass Flow Controller Signal Cable SC01 | SC01 | 1piece | JPY: 10,400 | USD: 65.19 |
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3-5065-01 | Mass Flow Controller 20SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5065-02 | Mass Flow Controller 20SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5065-03 | Mass Flow Controller 20SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5065-04 | Mass Flow Controller 20SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5065-05 | Mass Flow Controller 20SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5066-01 | Mass Flow Controller 50SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5066-02 | Mass Flow Controller 50SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5066-03 | Mass Flow Controller 50SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5066-04 | Mass Flow Controller 50SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5066-05 | Mass Flow Controller 50SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5067-01 | Mass Flow Controller 100SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5067-02 | Mass Flow Controller 100SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5067-03 | Mass Flow Controller 100SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5067-04 | Mass Flow Controller 100SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5067-05 | Mass Flow Controller 100SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5068-01 | Mass Flow Controller 200SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5068-02 | Mass Flow Controller 200SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5068-03 | Mass Flow Controller 200SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5068-04 | Mass Flow Controller 200SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5068-05 | Mass Flow Controller 200SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5069-01 | Mass Flow Controller 500SCCM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5069-02 | Mass Flow Controller 500SCCM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5069-03 | Mass Flow Controller 500SCCM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5069-04 | Mass Flow Controller 500SCCM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5069-05 | Mass Flow Controller 500SCCM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5070-01 | Mass Flow Controller 1SLM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5070-02 | Mass Flow Controller 1SLM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5070-03 | Mass Flow Controller 1SLM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5070-04 | Mass Flow Controller 1SLM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5070-05 | Mass Flow Controller 1SLM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5071-01 | Mass Flow Controller 2SLM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5071-02 | Mass Flow Controller 2SLM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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|
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3-5071-03 | Mass Flow Controller 2SLM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5071-04 | Mass Flow Controller 2SLM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5071-05 | Mass Flow Controller 2SLM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5072-01 | Mass Flow Controller 5SLM-Air C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5072-02 | Mass Flow Controller 5SLM-N2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5072-03 | Mass Flow Controller 5SLM-Ar C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5072-04 | Mass Flow Controller 5SLM-He C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5072-05 | Mass Flow Controller 5SLM-H2 C1005 | C1005 | 1piece | JPY: 104,000 | USD: 651.92 |
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3-5064-11 | ［Discontinued］Mass Flow Controller Control Power with Display Settings Panel Mount Type PA01S | PA01S | 1piece | JPY: 72,300 | USD: 453.21 |
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3-5064-12 | ［Discontinued］Mass Flow Controller Control Power with Display Settings Installation Type PA01PS | PA01PS | 1piece | JPY: 72,300 | USD: 453.21 |
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