SMC Corporation

Ionizer component

SMC Corporation

Surface electrometer sensor　IZD10510

Detects the charging potential of the workpiece and outputs an analog voltage.
For charging potential measurement.

SMC Corporation

Ionizer Width: 300 mm　IZS31300P

Three types of sensors can be selected.
High-speed static elimination is performed by the feedback sensor.

SMC Corporation

Ionizer Width: 380 mm　IZS31380PB

Three types of sensors can be selected.
High-speed static elimination is performed by the feedback sensor.

SMC Corporation

Ionizer Power Cable 3 m

SMC Corporation

Ionizer cartridge　IZS31NT

For static electricity removal.

SMC Corporation

Ionizer AC Adaptor　IZS41CG1

For static electricity removal.

SMC Corporation

Gas filter　SFB30502

Compatible with element replaceable cartridge types, SFA100, 200, 300 and SFB100.
Compact disposable type for semiconductor processes, compatible with SFB300 and SFC100.

SMC Corporation

Gas filter　SFC10502

Compatible with element replaceable cartridge types, SFA100, 200, 300 and SFB100.
Compact disposable type for semiconductor processes, compatible with SFB300 and SFC100.

SMC Corporation

Clean air filter　SFD10002B

Built-in hollow fiber element.
Pressure drop: 0.03 MPa(Primary Pressure 0.7 MPa, Maximum Flow Rate) capability.

SMC Corporation

Clean air filter　SFD100C08B

Built-in hollow fiber element.
Pressure drop: 0.03 MPa(Primary Pressure 0.7 MPa, Maximum Flow Rate) capability.

SMC Corporation

Clean air filter　SFD100N02

Built-in hollow fiber element.
Pressure drop: 0.03 MPa(Primary Pressure 0.7 MPa, Maximum Flow Rate) capability.

SMC Corporation

Clean air filter　SFD10102

Built-in hollow fiber element.
Pressure drop: 0.03 MPa(Primary Pressure 0.7 MPa, Maximum Flow Rate) capability.

SMC Corporation

Clean air filter　SFD20002

Built-in hollow fiber element.
Pressure drop: 0.03 MPa(Primary Pressure 0.7 MPa, Maximum Flow Rate) capability.