ข้อมูลจําเพาะ

• Target Size: Max150mm□
• Spin Motor: AC Servo Motor
• Cup Outer Diameter: φ300 mm
• Speed: 20~9000rpm (Max)
• Cup Material: SUS+ Meat
• Rotational accuracy: +/- 2rpm
• Substrate fixing method: vacuum adsorption method
• rotating: digital display on touch panel
• Table: Delrin
• Number of programs: 100 patterns, 10 steps
• Adsorption Table: Φ18 mm/Φ46 mm/Φ96 mm
• There is one type of sample table for each device.
• Components: Body x 1, Sample Stand (For φ6, POM) x 1, Substrate Adsorption Vacuum Pump x 1
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