기능

• A highly reliable oil rotary vacuum pump with low vibration and noise.
• We use a forced refueling system that makes it difficult to reduce the exhaust velocity even near atmospheric pressure.
• Rotating blade type pump with excellent maintainability.
• For vacuum film deposition equipment such as vapor deposition and sputtering.
• For analysis equipment and leak test equipment.
• For various vacuum devices such as vacuum drying and gas replacement.