Spec

• measurement range (X x Y x Z) : 800 to 1500 x 800 to 1750 x 100 to 150 mm
• Observation image: program-controlled power turret 1 x -2 x -6 x
• Minimum Displayed Amount: 0.1 μm
• Length measuring unit: linear encoder
• Imaging Device: B CCD (1/2 Type)
• Lighting Device/Vertical Epi-illumination: white LED
• Lighting Device/Transmissive Lighting: white LED
• Lighting Device/Program Control Ring Lighting: white LED
• Measurement Precision E1/X/Y Axis: (1.5 + 3L/1000) μm to (2.2 + 3L/1000) μm
• Measurement Precision E1/Z Axis (Picture): (1.5 + 4L/1000) μm to (2.5 + 5L/1000) μm
• Measurement Accuracy E2/XY Axes: (2.5 + 4L/1000) μm to (3.5 + 4L/1000) μm
• Repeatability Short Dimensions/X/Y Axis: 3σ = 0.2 μm
• Repetitive Precision Length Dimensions/X/Y Axis: 3σ = 0.7 to 1.5 μm
• Tracking auto focus device: with/without
• Size of glass: 883 to 1714 x 958 to 1968 mm
• maximum loading capacity of measurement: 10 to 30 kg
• Size: External view of main unit Dimensions (W x D x H)/1475 to 2440 x 1860 to 2898 x 1554 to 1603 mm
• Weight : Approx . 2050 to 4500 kg (Including the installation table)
•  
• *Please inquire about the price.
• *You need to register as an AXEL shop member to issue an estimate.
•