Spec

• X Axis measurement range: 400 mm
• Y Axis measurement range: 400 mm
• Z-Axis measurement range: 200 mm
• Observation device: program-controlled power turret 1 x -2 x -6 x
• Minimum Displayed Amount: 0.01 μm
• Length measuring unit: linear encoder
• Imaging Device: B CCD (1/2 Type)
• Lighting Device/Vertical Epi-illumination: Halogen
• Lighting Devices/Transmissive Lighting: Halogen
• Lighting Device/Program Control Ring Lighting: Halogen
• Measurement Precision (E1)/X and Y Axes: (0.25 + L/1000) μm
• Measurement Precision (E1)/Z Axis (full stroke): (1.5 + 2L/1000) μm (Range 200 mm)
• Measurement Precision (E1)/Z Axis (50 mm stroke): (1.0 + 2L/1000) μm (Range 10 to 60 mm)
• Accuracy of Measurement (E2)/XY Plane: (0.5 + 2L/1000) μm
• Tracking auto focus device: with/without
• Size of mounted glass: 493 x 551 mm
• maximum loading capacity of measurement: 40 kg
• Size: Body External View Dimensions (W x D x H)/1172 x 1735 x 1910 mm
• Weight : about 2150 kg (Including the installation table)
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• *Please inquire about the price.
• *You need to register as an AXEL shop member to issue an estimate.
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